Sure. Chief among those dimensions is the fact that it's not used as a serious production technology, so the manufacturing of these systems doesn't benefit from economy of scale.
E-beam certainly does provide a bounding limit on how expensive EUV can get, but we're not in danger of hitting that limit anytime soon.
I expect that EUV will become cheaper/more productive per dollar in the medium term, unless ASML starts acting uncomfortably monopolistically (and it's probably in their interest to drive EUV adoption to starve out Nikon and Canon, anyway)
E-beam certainly does provide a bounding limit on how expensive EUV can get, but we're not in danger of hitting that limit anytime soon.
I expect that EUV will become cheaper/more productive per dollar in the medium term, unless ASML starts acting uncomfortably monopolistically (and it's probably in their interest to drive EUV adoption to starve out Nikon and Canon, anyway)